Fabrication of GaAs devices

• Main Author: Baca, A. G.
• Corporate Author: Institution of Electrical Engineers.
• Other Authors: Ashby, Carol Iris Hill, 1953-
• Format: eBook
• Language: English
• Published: London : Institution of Electrical Engineers, ©2005.
• Series: EMIS processing series ; no. 6.
• Subjects: Gallium arsenide semiconductors.; elektronické knihy; electronic books
• ISBN: 9781849190688
• Physical Description: 1 online zdroj (xvii, 350 pages) : illustrations.

This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...