Fabrication of GaAs devices
This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...
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| Main Author | |
|---|---|
| Corporate Author | |
| Other Authors | |
| Format | Electronic eBook |
| Language | English |
| Published |
London :
Institution of Electrical Engineers,
©2005.
|
| Series | EMIS processing series ;
no. 6. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781849190688 |
| Physical Description | 1 online zdroj (xvii, 350 pages) : illustrations. |
Glossary of Terms