Thin film processes II

• Other Authors: Vossen, John L., Kern, Werner, 1925-
• Format: eBook
• Language: English
• Published: Boston : Academic Press, c1991.
• Series: Thin film processes ; 2
• Subjects: Thin films.; elektronické knihy; electronic books
• ISBN: 9780080524214; 9781601192905; 9780127282510
• Physical Description: 1 online zdroj (xiii, 866 p.) : ill.

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to t...