Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics

• Main Author: Williams, Michael E.
• Other Authors: Baldwin, David G., Manz, Paul C.
• Format: eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, c1995.
• Subjects: Semiconductor industry > Employees > Health and hygiene.; Industrial hygiene.; elektronické knihy; electronic books
• ISBN: 9781591241447; 9780815513698
• Physical Description: 1 online zdroj (xv, 348 p.) : ill.

This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...