Handbook of semiconductor silicon technology

This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.

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Bibliographic Details
Other Authors: O'Mara, William C., Herring, Robert B., Hunt, Lee P.
Format: eBook
Language: English
Published: Park Ridge, N.J. : Noyes Publications, c1990.
Series: Materials science and process technology series.
Subjects:
ISBN: 9781591242949
9780815512370
Physical Description: 1 online zdroj (xx, 795 p.) : ill.

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Table of contents