Handbook of semiconductor silicon technology
This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.
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Other Authors: | , , |
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Format: | eBook |
Language: | English |
Published: |
Park Ridge, N.J. :
Noyes Publications,
c1990.
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Series: | Materials science and process technology series.
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Subjects: | |
ISBN: | 9781591242949 9780815512370 |
Physical Description: | 1 online zdroj (xx, 795 p.) : ill. |
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