Handbook of VLSI microlithography principles, technology, and applications

• Other Authors: Helbert, John N.
• Format: eBook
• Language: English
• Published: Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., c2001.
• Edition: 2nd ed.
• Series: Materials science and process technology series. Electronic materials and process technology.
• Subjects: Integrated circuits > Very large scale integration.; Microlithography.; elektronické knihy; electronic books
• ISBN: 9781591242758; 9780815514442; 9780815517795; 9780815517801
• Physical Description: 1 online zdroj (xxi, 1001 p.) : ill.

This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...