Handbook of semiconductor wafer cleaning technology science, technology, and applications

• Other Authors: Kern, Werner, 1925-
• Format: eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, c1993.
• Series: Materials science and process technology series. Electronic materials and process technology.
• Subjects: Semiconductor wafers > Cleaning.; elektronické knihy; electronic books
• ISBN: 9781591240938; 9780815513315
• Physical Description: 1 online zdroj (xx, 623 p.) : ill.

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.