Handbook of semiconductor wafer cleaning technology science, technology, and applications

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.

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Bibliographic Details
Other Authors: Kern, Werner, 1925-
Format: eBook
Language: English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, c1993.
Series: Materials science and process technology series. Electronic materials and process technology.
Subjects:
ISBN: 9781591240938
9780815513315
Physical Description: 1 online zdroj (xx, 623 p.) : ill.

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