Handbook of silicon wafer cleaning technology

• Other Authors: Reinhardt, Karen A., Kern, Werner, 1925-
• Format: eBook
• Language: English
• Published: Norwich, NY : William Andrew, ©2008.
• Edition: 2nd ed.
• Series: Materials science and process technology series.
• Subjects: Silicon-on-insulator technology.; elektronické knihy; electronic books
• ISBN: 9780815517733; 9780815515548; 9780815517719
• Physical Description: 1 online zdroj (xxvi, 718 pages) : illustrations.

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with...