Handbook of thin film deposition techniques, processes, and technologies

• Other Authors: Seshan, Krishna.
• Format: eBook
• Language: English
• Published: Waltham [Mass.] : William Andrew, 2012
• Edition: 3rd ed.
• Subjects: Thin film devices > Design and construction > Handbooks, manuals, etc.; Thin films.; Thin film devices > Design and construction.; elektronické knihy; electronic books
• ISBN: 9781437778748
• Physical Description: 1 online zdroj (xviii, 392 p.)