Handbook of thin film deposition techniques, processes, and technologies
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| Other Authors | |
|---|---|
| Format | eBook |
| Language | English |
| Published |
Waltham [Mass.] :
William Andrew,
2012
|
| Edition | 3rd ed. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781437778748 |
| Physical Description | 1 online zdroj (xviii, 392 p.) |
Glossary of Terms