Adhesion aspects in MEMS-NEMS

• Other Authors: Kim, Seong H., Dugger, M. T., Mittal, K. L., 1945-
• Format: eBook
• Language: English
• Published: Leiden ; Boston : Brill, 2010.
• Subjects: Microelectromechanical systems.; Nanoelectromechanical systems.; Adhesion.; Surfaces (Technology); elektronické knihy; electronic books
• ISBN: 9781615839476
• Physical Description: 1 online zdroj (xi, 409 p.) : ill.