Developments in surface contamination and cleaning particle deposition, control and removal

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Bibliographic Details
Other Authors: Kohli, Rajiv, 1947-, Mittal, K. L., 1945-
Format: eBook
Language: English
Published: Amsterdam ; Boston : Elsevier/William Andrew, c2010.
Subjects:
ISBN: 9781437778311
Physical Description: 1 online zdroj (xv, 286 p., 8 p. of plates) : ill. (some col.)

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