Lecture notes on principles of plasma processing

Saved in:
Bibliographic Details
Main Authors Chen, Francis F., 1929- (Author), Chang, Jane P., 1970- (Author)
Format Book
LanguageEnglish
Published New York : Kluwer Academic/Plenum Publishers, c2003
Subjects
ISBN0306474972
978-0-306-47497-2
Physical Descriptionix, 208 s. : il. ; 28 cm + 1 CD-ROM

Cover

Status More Information Location Call Number
Holdings details from Knihovna UTB
Status In house loan More Information Location Study room - 3rd floor Call Number 533/CHEN,F.F.