Lecture notes on principles of plasma processing
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Main Authors: | , |
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Format: | Book |
Language: | English |
Published: |
New York :
Kluwer Academic/Plenum Publishers,
c2003
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Subjects: | |
ISBN: | 0306474972 978-0-306-47497-2 |
Physical Description: | ix, 208 s. : il. ; 28 cm + 1 CD-ROM |
Status In house loan |
Description Location |
Study room - 3rd floor | Call Number | 533/CHEN,F.F. |
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Status | Description | Location | Call Number | |
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In house loan | Study room - 3rd floor | 533/CHEN,F.F. |