Lecture notes on principles of plasma processing

Saved in:
Bibliographic Details
Main Authors: Chen, Francis F., 1929- (Author), Chang, Jane P., 1970- (Author)
Format: Book
Language: English
Published: New York : Kluwer Academic/Plenum Publishers, c2003
Subjects:
ISBN: 0306474972
978-0-306-47497-2
Physical Description: ix, 208 s. : il. ; 28 cm + 1 CD-ROM

Cover

Table of contents

Status Description Location Call Number
Status
In house loan
Description

Location
Study room - 3rd floor Call Number 533/CHEN,F.F.

Status Description Location Call Number
In house loan Study room - 3rd floor 533/CHEN,F.F.