Lecture notes on principles of plasma processing
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| Main Authors | , |
|---|---|
| Format | Book |
| Language | English |
| Published |
New York :
Kluwer Academic/Plenum Publishers,
c2003
|
| Subjects | |
| ISBN | 0306474972 978-0-306-47497-2 |
| Physical Description | ix, 208 s. : il. ; 28 cm + 1 CD-ROM |
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