Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author	Madou, Marc J., 1953- (Author)
Format	Book
Language	English
Published	Boca Raton : CRC Press, c2012
Edition	3rd ed.
Subjects	mikrotechnologie nanotechnologie mikroelektronika mikroelektromechanické systémy nanomateriály microtechnology nanotechnology microelectronics microelectromechanical systems nanostructure materials příručky handbooks, manuals, etc
ISBN	9780849331800 978-1-4200-5511-5 978-1-4200-5519-1 978-1-4200-5516-0
Physical Description	3 sv. : il. (převáž. barev.), 29 cm

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Status In house loan	More Information 1. díl	Location Study room - 3rd floor	Call Number 62/MADOU,M.J.
Status In house loan	More Information 2. díl	Location Study room - 3rd floor	Call Number 62/MADOU,M.J.
Status In house loan	More Information 3. díl	Location Study room - 3rd floor	Call Number 62/MADOU,M.J.