Holdings: Fundamentals of microfabrication and nanotechnology

Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author:	Madou, Marc J., 1953- (Author)
Format:	Book
Language:	English
Published:	Boca Raton : CRC Press, c2012
Edition:	3rd ed.
Subjects:	mikrotechnologie nanotechnologie mikroelektronika mikroelektromechanické systémy nanomateriály microtechnology nanotechnology microelectronics microelectromechanical systems nanostructure materials příručky handbooks, manuals, etc
ISBN:	9780849331800 978-1-4200-5511-5 978-1-4200-5519-1 978-1-4200-5516-0
Physical Description:	3 sv. : il. (převáž. barev.), 29 cm

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Table of contents

Glossary of Terms

Status	Description	Location	Call Number
Status In house loan	Description 3. díl Location	Study room - 3rd floor	Call Number	62/MADOU,M.J.
Status In house loan	Description 2. díl Location	Study room - 3rd floor	Call Number	62/MADOU,M.J.
Status In house loan	Description 1. díl Location	Study room - 3rd floor	Call Number	62/MADOU,M.J.

Status	Description	Location	Call Number
In house loan	3. díl	Study room - 3rd floor	62/MADOU,M.J.
In house loan	2. díl	Study room - 3rd floor	62/MADOU,M.J.
In house loan	1. díl	Study room - 3rd floor	62/MADOU,M.J.