Introduction to microfabrication

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Bibliographic Details
Main Author	Franssila, Sami (Author)
Format	Book
Language	English
Published	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010
Edition	2nd ed.
Subjects	mikrotechnologie mikroelektronika MEMS (elektronika) mikrofluidika microtechnology microelectronics MEMS (electronics) microfluidics monografie monographs
ISBN	9780470749838
Physical Description	xi, 518 s. : il. ; 25 cm

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Holdings details from Knihovna UTB
Status	More Information	Location	Call Number
Status 30 days - deposit	More Information	Location Depository	Call Number 62/FRANSSILA,S.

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