MEMS a practical guide to design, analysis, and applications

• Other Authors: Korvink, Jan G., 1960- (Editor), Paul, Oliver (Editor)
• Format: eBook
• Language: English
• Published: New York : Heidelberg : William Andrew ; Springer, 2006
• Subjects: mikroelektromechanické systémy; mikroelektronika; microelectromechanical systems; microelectronics; elektronické knihy; kolektivní monografie; electronic books; collective monographs
• ISBN: 9783540336556
• Physical Description: xxv, 965 s. : il., grafy