Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
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| Other Authors | |
|---|---|
| Format | Book |
| Language | English |
| Published |
Park Ridge, New Jersey :
Noyes Publications,
c1990
|
| Series | Materials science and process technology series
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780815512202 0-8155-1220-1 |
| Physical Description | XXIII, 523 s. : il. |
Glossary of Terms