3D and circuit integration of MEMS

• Main Author: Esashi, Masayoshi, 1949- (Author)
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH, 2021.
• Subjects: mikroelektromechanické systémy; integrované obvody; křemík; microelectromechanical systems; integrated circuits; silicon; elektronické knihy; kolektivní monografie; electronic books; collective monographs
• ISBN: 9783527823239; 9783527823253; 9783527823246; 9783527346479
• Physical Description: 1 online zdroj