Growth and Transport in Nanostructured Materials : Reactive Transport in PVD, CVD, and ALD

• Main Author: Yanguas-Gil, Angel. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: SpringerBriefs in Materials,
• Subjects: nanostruktury; akumulace energie; nanochemie; polovodiče; fyzika povrchů pevných látek; fázová rozhraní; tenké vrstvy; nanostructures; energy storage; nanochemistry; semiconductors; surfaces (physics); interfaces (physical sciences); thin films; elektronické knihy; monografie; electronic books; monographs
• ISBN: 9783319246727
• Physical Description: 1 online resource (XI, 128 p. 57 illus., 20 illus. in color.)

This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...