Growth and Transport in Nanostructured Materials : Reactive Transport in PVD, CVD, and ALD

This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...

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Bibliographic Details
Main Author Yanguas-Gil, Angel (Author)
Corporate Author SpringerLink (Online service)
Format Electronic eBook
LanguageEnglish
Published Cham : Springer International Publishing : Imprint: Springer, 2017.
SeriesSpringerBriefs in Materials,
Subjects
Online AccessFull text
ISBN9783319246727
ISSN2192-1091
DOI10.1007/978-3-319-24672-7
Physical Description1 online resource (XI, 128 p. 57 illus., 20 illus. in color.)

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