以Au和Au-Cu为衬底的Si/DLC薄膜的机械性能

O647; 通过纳米划痕测试技术(nano-scratch)研究了以Au和Au-Cu(x_(Au)=93%,x_(Cu)=7%)为衬底,多晶硅Si为基片的类金刚石(DLC)薄膜的机械性能,其中DLC薄膜厚度约为10 nm.研究结果表明,Au-Cu衬底对Si/DLC薄膜的结合力比Au衬底对Si/DLC薄膜的结合力要好.紫外(244 nm)为激发光源的拉曼光谱测试结果显示在相同薄膜制备条件下Au-Cu衬底比Au衬底含有更多的sp~3矿成分,同时也意味着以Au-cu为衬底的Si/DLC薄膜具有更高的硬度和密度.通过对研究结果的分析讨论可以得出,由于具有较好的结合力和高硬度,Au-Cu是磁记录磁头保护...

Full description

Saved in:
Bibliographic Details
Published in物理化学学报 Vol. 25; no. 11; pp. 2391 - 2394
Main Authors 屈少华, 贾丽慧
Format Journal Article
LanguageChinese
Published 襄樊学院物理系,湖北襄樊,441053%武汉工程大学化工与制药学院,湖北省新型反应器与绿色化学工艺重点实验室,武汉,430074 2009
Subjects
类金刚石薄膜
结合力
Diamond-like carbon film
硬度
Raman spectroscopy
Hardness
Adhesion
拉曼光谱
Online AccessGet full text
ISSN1000-6818

Cover

Abstract O647; 通过纳米划痕测试技术(nano-scratch)研究了以Au和Au-Cu(x_(Au)=93%,x_(Cu)=7%)为衬底,多晶硅Si为基片的类金刚石(DLC)薄膜的机械性能,其中DLC薄膜厚度约为10 nm.研究结果表明,Au-Cu衬底对Si/DLC薄膜的结合力比Au衬底对Si/DLC薄膜的结合力要好.紫外(244 nm)为激发光源的拉曼光谱测试结果显示在相同薄膜制备条件下Au-Cu衬底比Au衬底含有更多的sp~3矿成分,同时也意味着以Au-cu为衬底的Si/DLC薄膜具有更高的硬度和密度.通过对研究结果的分析讨论可以得出,由于具有较好的结合力和高硬度,Au-Cu是磁记录磁头保护膜Si/DLC薄膜的更好lead材料.
AbstractList O647; 通过纳米划痕测试技术(nano-scratch)研究了以Au和Au-Cu(x_(Au)=93%,x_(Cu)=7%)为衬底,多晶硅Si为基片的类金刚石(DLC)薄膜的机械性能,其中DLC薄膜厚度约为10 nm.研究结果表明,Au-Cu衬底对Si/DLC薄膜的结合力比Au衬底对Si/DLC薄膜的结合力要好.紫外(244 nm)为激发光源的拉曼光谱测试结果显示在相同薄膜制备条件下Au-Cu衬底比Au衬底含有更多的sp~3矿成分,同时也意味着以Au-cu为衬底的Si/DLC薄膜具有更高的硬度和密度.通过对研究结果的分析讨论可以得出,由于具有较好的结合力和高硬度,Au-Cu是磁记录磁头保护膜Si/DLC薄膜的更好lead材料.
Abstract_FL The mechanical properties of Si/DLC (diamond-like carbon, around 10 nm) films on Au and Au-Cu (x_(Au)= 93％, x_(Cu)=7％) substrates were studied by nanoscratch tests. Results show that Au-Cu exhibits better adhesion to Si/ DLC than Au does to Si/DLC. Ultraviolet (244 nm) Raman spectra show that DLC films on Au-Cu contain more sp~3 character than those on Au using the same batch coating process. This indicates greater hardness and higher density of the films on Au-Cu. The implications of these results on the mechanisms proposed for film formation are discussed. Au-Cu is thus a better candidate for use as a lead material in Si/DLC coatings because of its better adhesion and greater hardness for magnetic recording sliders.
Author 屈少华
贾丽慧
AuthorAffiliation 襄樊学院物理系,湖北襄樊,441053%武汉工程大学化工与制药学院,湖北省新型反应器与绿色化学工艺重点实验室,武汉,430074
AuthorAffiliation_xml – name: 襄樊学院物理系,湖北襄樊,441053%武汉工程大学化工与制药学院,湖北省新型反应器与绿色化学工艺重点实验室,武汉,430074
Author_FL JIA Li-Hui
QU Shao-Hua
Author_FL_xml – sequence: 1
  fullname: QU Shao-Hua
– sequence: 2
  fullname: JIA Li-Hui
Author_xml – sequence: 1
  fullname: 屈少华
– sequence: 2
  fullname: 贾丽慧
BookMark eNrjYmDJy89LZWHgNDQwMNA1szC04GDgLS7OTDIwNbc0MjU0NeNkMHmye6lj6dNJPY6lus6lT3bserFwzdNdU5_PagnO1HfxcX4xreVF2xwg99mcXc8WbXjWsPxF814eBta0xJziVF4ozc2g7uYa4uyhW56Yl5aYlx6flV9alAeUiS_PyaioSDIyMLA0NDQwNjUmXiUAiTtGUQ
ClassificationCodes O647
ContentType Journal Article
Copyright Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
Copyright_xml – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
DBID 2B.
4A8
92I
93N
PSX
TCJ
DatabaseName Wanfang Data Journals - Hong Kong
WANFANG Data Centre
Wanfang Data Journals
万方数据期刊 - 香港版
China Online Journals (COJ)
China Online Journals (COJ)
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Chemistry
DocumentTitle_FL Mechanical Properties of Si/DLC Films on Au and Au-Cu Substrates
EndPage 2394
ExternalDocumentID wlhxxb200911035
GrantInformation_xml – fundername: the Science and Technology Research Project Foundation of the Educational Department of Hubei Province, China; 湖北省教育厅重大科研项
  funderid: (Z200525001); (Z200525001)
GroupedDBID -02
2B.
4A8
5XA
5XC
92E
92I
93N
AAXUO
AAYWO
ACGFS
ADMLS
AENEX
ALMA_UNASSIGNED_HOLDINGS
CCEZO
CDRFL
CW9
EBS
EJD
FDB
FIJ
M41
OK1
P2P
PSX
RIG
ROL
TCJ
TGP
U1G
U5L
UY8
ID FETCH-wanfang_journals_wlhxxb2009110353
ISSN 1000-6818
IngestDate Thu May 29 03:54:34 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 11
Keywords 类金刚石薄膜
结合力
Diamond-like carbon film
硬度
Raman spectroscopy
Hardness
Adhesion
拉曼光谱
Language Chinese
LinkModel OpenURL
MergedId FETCHMERGED-wanfang_journals_wlhxxb2009110353
ParticipantIDs wanfang_journals_wlhxxb200911035
PublicationCentury 2000
PublicationDate 2009
PublicationDateYYYYMMDD 2009-01-01
PublicationDate_xml – year: 2009
  text: 2009
PublicationDecade 2000
PublicationTitle 物理化学学报
PublicationTitle_FL ACTA PHYSICO-CHIMICA SINICA
PublicationYear 2009
Publisher 襄樊学院物理系,湖北襄樊,441053%武汉工程大学化工与制药学院,湖北省新型反应器与绿色化学工艺重点实验室,武汉,430074
Publisher_xml – name: 襄樊学院物理系,湖北襄樊,441053%武汉工程大学化工与制药学院,湖北省新型反应器与绿色化学工艺重点实验室,武汉,430074
SSID ssib057925156
ssib002258135
ssib001105268
ssj0030168
ssib024507715
ssib051374152
Score 3.6797805
Snippet O647; 通过纳米划痕测试技术(nano-scratch)研究了以Au和Au-Cu(x_(Au)=93%,x_(Cu)=7%)为衬底,多晶硅Si为基片的类金刚石(DLC)薄膜的机械性能,其中DLC薄膜厚度约为10 nm.研究...
SourceID wanfang
SourceType Aggregation Database
StartPage 2391
Title 以Au和Au-Cu为衬底的Si/DLC薄膜的机械性能
URI https://d.wanfangdata.com.cn/periodical/wlhxxb200911035
Volume 25
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVALS
  databaseName: IngentaConnect Open Access Journals
  issn: 1000-6818
  databaseCode: FIJ
  dateStart: 20080115
  customDbUrl:
  isFulltext: true
  dateEnd: 20150615
  titleUrlDefault: http://www.ingentaconnect.com/content/title?j_type=online&j_startat=Aa&j_endat=Af&j_pagesize=200&j_page=1
  omitProxy: true
  ssIdentifier: ssj0030168
  providerName: Ingenta
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9NAELaqXOCCeIpHQTkw4mSI17v27nHtOCoVcGmReqviPCgSChLEouoJiYoTJyQ4oF5AQlw4cERB_Js25GcwM97EpopU4GLtY3Zmvhnb-8Xxrj3vpjCByaUSftDVPV8O84GfD_KhL3Id0ULHfsSfA7r_IFp7KNe31NZKY7X21lIxzm_39pauK_mfrGIb5pVWyf5DZhdKsQHLmF88Yobx-Fc5hkxCkoBVtoBMgRGgU1v4acEdGhILmQYbgE2pH6tGQRaDsaDlBhlu30tJxETYQAUdgUkXIpBxldREYAUkLSroFtiYhUNI2nV2SwO1AWtYQ4u0oVmdkn4s2DbYegFVWXR-nnN2MQCtudACE_DoNuisEkFQCC2bA2yzFtQY__H4oro9cgCUw2I1WawcMGAM4VridgxJSLEVKQ1MjINAWOIlOkUq6U3WEITixjlAwmMYT0xDUC3JJ-yD5DDWwrIIlBNmiDrjLsQaccxRuLMEwnI_Y0qfDjiPEacPz5LMOaA7pM2dF5K7DLlX2Y0pAkmH7RpIxPJsOm9LGUsu6Zg141GQSySckV3sspY0lC0YgdLtY-HCYIZEOmsTJu1MEGk3h7oZtVzKPr9zBPX5MSy_zea4FlZlRUQWr4e-eLKzu5vT2YLkNKQdJJBG05OVzt31iusHvFVRjYsqHVTcX0j8pRNXXFcFIZHnBZdXsUFqTxtJlbQNJzq3btYB4lV8o2F39KhGODfPemfcL8WmLS_7c97K3s5571Q6_0DjBU8e_vhsi6O3b_iSP_w-mX38ejR59-vD_sbjO3hhz97vz14fYHV6MJl--jZ9-WX26udF71Yn20zXfGd1291onm8fC0d4yWuMno4Gl72m6bd6QyEHXdFXUvQjgtnqatVT_TzKw-CK1zxJ29WTRa55p8v_UOnB46rXGD8rBteRio_zG5yS3xsClCo
linkProvider Ingenta
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E4%BB%A5Au%E5%92%8CAu-Cu%E4%B8%BA%E8%A1%AC%E5%BA%95%E7%9A%84Si%2FDLC%E8%96%84%E8%86%9C%E7%9A%84%E6%9C%BA%E6%A2%B0%E6%80%A7%E8%83%BD&rft.jtitle=%E7%89%A9%E7%90%86%E5%8C%96%E5%AD%A6%E5%AD%A6%E6%8A%A5&rft.au=%E5%B1%88%E5%B0%91%E5%8D%8E&rft.au=%E8%B4%BE%E4%B8%BD%E6%85%A7&rft.date=2009&rft.pub=%E8%A5%84%E6%A8%8A%E5%AD%A6%E9%99%A2%E7%89%A9%E7%90%86%E7%B3%BB%2C%E6%B9%96%E5%8C%97%E8%A5%84%E6%A8%8A%2C441053%25%E6%AD%A6%E6%B1%89%E5%B7%A5%E7%A8%8B%E5%A4%A7%E5%AD%A6%E5%8C%96%E5%B7%A5%E4%B8%8E%E5%88%B6%E8%8D%AF%E5%AD%A6%E9%99%A2%2C%E6%B9%96%E5%8C%97%E7%9C%81%E6%96%B0%E5%9E%8B%E5%8F%8D%E5%BA%94%E5%99%A8%E4%B8%8E%E7%BB%BF%E8%89%B2%E5%8C%96%E5%AD%A6%E5%B7%A5%E8%89%BA%E9%87%8D%E7%82%B9%E5%AE%9E%E9%AA%8C%E5%AE%A4%2C%E6%AD%A6%E6%B1%89%2C430074&rft.issn=1000-6818&rft.volume=25&rft.issue=11&rft.spage=2391&rft.epage=2394&rft.externalDocID=wlhxxb200911035
thumbnail_s http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fwlhxxb%2Fwlhxxb.jpg