HIGH ASPECT RATIO MICROELECTRODE ARRAYS ENABLED TO HAVE CUSTOMIZABLE LENGTHS AND METHODS OF MAKING THE SAME

• Main Authors: TATHIREDDY, PRASHANT, SOLZBACHER, FLORIAN
• Format: Patent
• Language: English; French
• Published: 10.12.2009
• Subjects: BANDAGES, DRESSINGS OR ABSORBENT PADS; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF,TUBULAR STRUCTURES OF THE BODY, E.G. STENTS; ELECTROTHERAPY; FILTERS IMPLANTABLE INTO BLOOD VESSELS; FIRST-AID KITS; FOMENTATION; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HUMAN NECESSITIES; HYGIENE; MAGNETOTHERAPY; MEDICAL OR VETERINARY SCIENCE; MICROSTRUCTURAL TECHNOLOGY; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; PROSTHESES; RADIATION THERAPY; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSPORTING; TREATMENT OR PROTECTION OF EYES OR EARS; ULTRASOUND THERAPY

A method of fabricating an array of micro electrodes enabled to have customizable lengths. A substantially criss-cross pattern of channels on a top surface of the work-piece substrate (10) is formed using electrical discharge machining to form a plurality of shaped columns (20) having tapered profiles. The shaped columns have a tapering profile which extends at least 50% of the length of the columns. The plurality of shaped columns is etched to sharpen the tapered tips into needle tips forming the array of microelectrodes. L'invention porte sur un procédé de fabrication d'un réseau de microélectrodes pouvant avoir des longueurs adaptables. Un motif sensiblement entrecroisé de canaux sur une surface supérieure du substrat de pièce à usiner (10) est formé à l'aide d'un usinage par décharges électriques pour former une pluralité de colonnes façonnées (20) ayant des profils effilés. Les colonnes façonnées ont un profil effilé qui s'étend sur au moins 50 % de la longueur des colonnes. Les différentes colonnes façonnées sont gravées pour affûter les extrémités effilées pointues d'aiguille formant le réseau de microélectrodes.