SCREEN PRINTING DEVICE AND SCREEN PRINTING METHOD
Prior to a mark imaging process executed for the purpose of detecting a position of recognition marks for positioning the substrate and the mask, an optical axis calibration processing process of detecting a horizontal relative position between imaging optical axes, and a surface correction data cre...
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          | Main Authors | , | 
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| Format | Patent | 
| Language | English | 
| Published | 
          
        01.08.2013
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| Subjects | |
| Online Access | Get full text | 
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| Summary: | Prior to a mark imaging process executed for the purpose of detecting a position of recognition marks for positioning the substrate and the mask, an optical axis calibration processing process of detecting a horizontal relative position between imaging optical axes, and a surface correction data creation processing process of detecting a local positional deviation of the imaging optical axes, which is caused by the travel of the imaging unit, are executed. Before starting production, a production pre-start precision evaluation process for evaluating a substrate positioning precision is executed by using a verification substrate and a verification mask, and after starting the production, a production post-start precision evaluation process for evaluating a substrate positioning precision after starting the production is executed by using a commercial production substrate and a commercial production mask. | 
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| Bibliography: | Application Number: US201113823974 |