3D measurement device, 3D measurement method, and manufacturing method of substrate

This invention provides a 3D measurement device capable of increasing the measurement precision using photometric stereo technology. The 3D measurement device comprises: a height measurement part, a 3D shape measurement part, and a compensation part. The height measurement part is configured for mea...

Full description

Saved in:
Bibliographic Details
Main Author SUGIURA, TAKAMASA
Format Patent
LanguageChinese
English
Published 01.06.2015
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:This invention provides a 3D measurement device capable of increasing the measurement precision using photometric stereo technology. The 3D measurement device comprises: a height measurement part, a 3D shape measurement part, and a compensation part. The height measurement part is configured for measuring the height or height shift of a predetermined position of a measurement subject. The 3D shape measurement part is configured for using the photometric stereo technology to measure the 3D shape of the measurement subject. The compensation part is configured for compensating the data obtained at the 3D shape measurement part according to the data obtained from the height measurement part.
Bibliography:Application Number: TW20143132648