DISTURBANCE COMPENSATION FOR CHARGED PARTICLE BEAM DEVICES

Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the disturbances, e.g., while executing a manipulation mode for repairing defects on a lithography mask.

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Bibliographic Details
Main Authors HARMSEN, Lucas, GNEDEL, Maximilian, KLAMANDT, Samuel, SCHINDLER, Bernd, BALLING, Steffen, SCHWARZ, Daniel, EMMRICH, Daniel Alexander, HAEBERLEN, Maik
Format Patent
LanguageEnglish
French
German
Published 06.08.2025
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the disturbances, e.g., while executing a manipulation mode for repairing defects on a lithography mask.
Bibliography:Application Number: EP20230777217