METHOD AND SYSTEM FOR PLASMA DIAGNOSTICS

The subject of the invention is a method of plasma diagnostics, in which an alternating voltage is applied to a reference electrode (6) with a measurable area AAP located in a plasma discharge chamber (1) and a first set of electric current and voltage waveforms is generated at the reference electro...

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Main Authors HRABOVSKÝ, Miroslav, HRUBANTOVÁ, Aneta, STRANÁK, Vítezslav, HUBICKA, Zdenek, OLEJNÍCEK, Jirí, SCHOVÁNEK, Petr, KSÍROVÁ, Petra, CTVRTLÍK, Radim, DVORÁKOVÁ, Michaela, CADA, Martin
Format Patent
LanguageEnglish
French
German
Published 21.08.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Abstract The subject of the invention is a method of plasma diagnostics, in which an alternating voltage is applied to a reference electrode (6) with a measurable area AAP located in a plasma discharge chamber (1) and a first set of electric current and voltage waveforms is generated at the reference electrode (6). After the completion of the measurement, the differential conductivity of the space charge sheath around the surface of the reference electrode (6) and its capacity are calculated from the measured dependences. Subsequently, an alternating voltage of the same frequency is applied to the main electrode located in the plasma and covered with a thick dielectric, and a second set of electric current and voltage waveforms is generated on the main electrode (7). From the measured values, the complex impedance of the main electrode (7) is determined and then the area of the main electrode is calculated, from which it is possible to determine other parameters such as electron temperature, voltage of the wall sheath, ion concentration and ion flux and more.
AbstractList The subject of the invention is a method of plasma diagnostics, in which an alternating voltage is applied to a reference electrode (6) with a measurable area AAP located in a plasma discharge chamber (1) and a first set of electric current and voltage waveforms is generated at the reference electrode (6). After the completion of the measurement, the differential conductivity of the space charge sheath around the surface of the reference electrode (6) and its capacity are calculated from the measured dependences. Subsequently, an alternating voltage of the same frequency is applied to the main electrode located in the plasma and covered with a thick dielectric, and a second set of electric current and voltage waveforms is generated on the main electrode (7). From the measured values, the complex impedance of the main electrode (7) is determined and then the area of the main electrode is calculated, from which it is possible to determine other parameters such as electron temperature, voltage of the wall sheath, ion concentration and ion flux and more.
Author SCHOVÁNEK, Petr
HRABOVSKÝ, Miroslav
HRUBANTOVÁ, Aneta
CADA, Martin
OLEJNÍCEK, Jirí
HUBICKA, Zdenek
CTVRTLÍK, Radim
KSÍROVÁ, Petra
DVORÁKOVÁ, Michaela
STRANÁK, Vítezslav
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– fullname: OLEJNÍCEK, Jirí
– fullname: SCHOVÁNEK, Petr
– fullname: KSÍROVÁ, Petra
– fullname: CTVRTLÍK, Radim
– fullname: DVORÁKOVÁ, Michaela
– fullname: CADA, Martin
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DocumentTitleAlternate VERFAHREN UND SYSTEM ZUR PLASMADIAGNOSE
PROCÉDÉ ET SYSTÈME DE DIAGNOSTIC PAR PLASMA
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RelatedCompanies Univerzita Palackého v Olomouci
Fyzikální ústav AV CR, v.v.i
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Snippet The subject of the invention is a method of plasma diagnostics, in which an alternating voltage is applied to a reference electrode (6) with a measurable area...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Title METHOD AND SYSTEM FOR PLASMA DIAGNOSTICS
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