Local surface plasmon resonance biochip, manufacturing method thereof, biosensing system comprising same and application of local surface plasmon resonance biochip

• Main Author: WU ZHAOPENG
• Format: Patent
• Language: Chinese; English
• Published: 04.12.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

The invention discloses a local surface plasmon resonance biochip. The biochip comprises the following components of: (1) a substrate; (2) a plurality of optical waveguides arranged in the middle of the substrate, wherein the plurality of optical waveguides form an optical waveguide array; (3) a titanium nitride nanocube arranged on the side surface of each optical waveguide; and (4) a plurality of microfluidic channels disposed in the substrate. In addition, the invention further provides a manufacturing method of the biochip, a biosensing system comprising the biochip and application of thebiochip. According to the biochip, the manufacturing cost can be reduced, the detection precision is improved, and meanwhile the requirement for high-flux rapid detection is met. 本发明公开了一种局域表面等离子体激元共振生物芯片，其包括：(1)基底；(2)设置在所述基底中部的多个光波导，所述多个光波导组成光波导阵列；(3)设置在每个所述光波导的侧表面上的氮化钛纳米立方体；(4)设置在基底中的多个微流体通道。此外，还提供了上述生物芯片的制造方法、包含上述生物芯片的生物传感系统及其应用。本发明的生物芯片既能够降低制造成本、提高检测精度同时还满足高通量快速检测的需求。