用于基于光热效应的红外扫描近场光学显微镜的方法与装置

• Format: Patent
• Language: Chinese
• Published: 07.06.2022
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; COLORIMETRY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

一种用于测量样本的子微米区域的红外吸收的系统和方法。红外光源可以照射位于与扫描探针显微镜(SPM)的针尖相互作用的区域中的样本，以产生与样本区域的红外吸收有关的光学性质的可测量变化的方式对样本进行刺激。探测光源指向样本和SPM针尖的区域，并且，从针尖和样本区域发出的探测光得到收集。所收集的光可用于导出样本区域的红外吸收光谱信息，可以是子微米尺度上的样本区域的红外吸收光谱信息。 Systems and methods may be provided for measuring an infrared absorption of a sub micrometer region of a sample. An Infrared light source may illuminate a sample in a region that is interacting with the tip of a Scanning Probe Microscope (SPM), stimulating the sample in a way that produces measurable optical properties related to Infrared absorption of the sample region. A probe light source is directed at the region of the sample and SPM tip, and probe light emanating from the tip and sample region is collected. The collected light may be used to derive infrared absorption spectrum information of the sample region, possibly on a sub-micron scale.