Sliding exhaust waveguide of electron cyclotron resonance heating system

• Main Authors: CHEN GANGYU, HUANG MEI, WANG JIEQIONG
• Format: Patent
• Language: Chinese; English
• Published: 28.05.2019
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

The invention belongs to a microwave technology, and relates to a sliding exhaust waveguide of an electron cyclotron resonance heating system. The sliding exhaust waveguide comprises two oppositely-installed corrugated main waveguides, a waveguide connecting section, a vacuum corrugated pipe and a corrugated pipe connecting section, a certain adjusting gap is reserved on the opposite inner side faces of the two corrugated main waveguides, and waveguide connecting flanges on the corrugated main waveguides are connected with the end of the corrugated pipe connecting section in a sealed mode. Thelower end of the corrugated pipe connecting section is provided with a vacuum pumping port and a vacuum monitoring port. The middle section part of the corrugated main waveguide is provided with vacuum extraction strip holes along the axial direction. Compared with an original air exhaust structure such as interval gaps, the vacuum extraction strip holes are small in microwave loss, the effectiveair exhaust cross section