种太阳光谱选择性吸收涂层及其制备方法

• Format: Patent
• Language: Chinese
• Published: 05.02.2019
• Subjects: BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PERFORMING OPERATIONS; RANGES; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TRANSPORTING; VENTILATING; WEAPONS

本发明公开了种太阳光谱选择性吸收涂层及其制备方法。该吸收涂层从基底向外，依次为金属红外高反射层、吸收层、减反射层和保护层，其中吸收层由过渡金属氮氧化物MoAlON或WAlON构成，其中，x＝0.1-0.9，y＝0.1-0.9。其制备方法，包括以下步骤：(1)采用直流磁控溅射法在基底表面制备金属红外高反射层；(2)采用Mo或W和Al纯金属靶，或者采用固定成分的MoAl或WAl靶，氩气、氮气和氧气气氛下共溅射形成吸收层；(3)选择Al靶，采用直流或中频磁控溅射法制备减反射层；(4)选择Si靶，采用直流或中频磁控溅射法制备保护层。本发明的吸收涂层具有光学性能优良、耐高温能力强、耐候性良好等特点，在制备工艺方面易于实现且调控简单，适用于平板集热器在我国的应用现状。 The invention discloses a solar spectrum selective absorption coating and a preparation method thereof. The absorption coating comprises a metal infrared high-reflection layer, an absorption layer, an antireflection layer and a protection layer which are successively arranged outwards from a substrate, wherein the absorption layer is formed by transition metal nitrogen oxide MoxAl1-xOyN1-y or WxAl1-xOyN1-y; x is 0.1-0.9; y is 0.1-0.9. The preparation method of the solar spectrum selective absorption coating comprises the following steps: (1) preparing the metal infrared high-reflection layer on the surface of the substrate via a direct-current magnetron sputtering method; (2) carryi