Piezoresistance-type micro-nano sensor based on double-sided surface stress and preparation method of piezoresistance-type micro-nano sensor

• Main Authors: CHEN YING, LI XINXIN
• Format: Patent
• Language: Chinese; English
• Published: 05.12.2012
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

The invention provides a piezoresistance-type micro-nano sensor based on double-sided surface stress, which is used for detecting the double-sided surface stress; and the piezoresistance-type micro-nano sensor comprises a micro-nano double-end clamped beam wrapped by an oxidation layer and a piezoresistance with an ion doping area completely penetrating the micro-nano double-end clamped beam along the thickness direction, and the axial stress effect produced along the axial direction of the micro-nano double-end clamped beam is used for detection when double sides of the micro-nano double-end clamped beam are subject to identical surface stress. In order to be applicable to the detection of the double-sided surface stress, the depth of the piezoresistance penetrates the thickness of the beam; and a piezoresistance-type micro-nano sensor for detecting the double-sided surface stress is produced by utilizing a micro-mechanical machining process. Compared with the prior art, the double-end clamped beam with nano