Characterization of La-doped xBiInOa（1 --x）PbTiOa Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method

La-doped and undoped xBiIn03-（1 - x）PbTi03 （BI-PT） thin films are deposited on （101）SrRuO3/（lOO）Pt/（lO0） MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly （100） orient...

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Bibliographic Details
Published in中国物理快报：英文版 no. 6; pp. 49 - 52
Main Author 孙科学 张淑仪 Kiyotaka Wasa 水修基
Format Journal Article
LanguageEnglish
Published 2016
Subjects
La掺杂
PbTiO3
压电薄膜
射频磁控溅射法
扫描电子显微镜
柱状结构
沉积
表征
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ISSN0256-307X
1741-3540

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Summary:La-doped and undoped xBiIn03-（1 - x）PbTi03 （BI-PT） thin films are deposited on （101）SrRuO3/（lOO）Pt/（lO0） MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly （100） oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices.
Bibliography:La-doped and undoped xBiIn03-（1 - x）PbTi03 （BI-PT） thin films are deposited on （101）SrRuO3/（lOO）Pt/（lO0） MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly （100） oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices.
Ke-Xue Sun, Shu-Yi Zhang, Kiyotaka Wasa, Xiu-Ji Shui（ 1Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093 2 Graduate School of Yokohama City University, Yokohama 236-0027, Japan）
11-1959/O4
ISSN:0256-307X
1741-3540