Optical and stress properties of flexible Nb2O5/SiO2 multi layer films deposited by E-gun evaporation with ion-beam assisted deposition

• Main Authors: Chen, Sheng-Bin, Chen, Hsi-Chao, Chang, Chun-Hao, Lu, Yu-Ru, Chen, Wei-Lin
• Format: Conference Proceeding
• Language: English
• Published: SPIE 15.06.2020
• ISBN: 9781510638532; 1510638539
• ISSN: 0277-786X
• DOI: 10.1117/12.2574756

The high & low refractive index (Nb2O5/SiO2)2 multi-layer films were deposited by E-gun evaporation with ion-beam assisted deposition (IAD) on flexible PET substrate. The optical property and anisotropic residual stress were investigated. The residual stress of each layer film was measured step by step with self-made shadow moiré interferometer. The experimental results showed the optimal oxygen flow of Nb2O5 and SiO2 were 20 and 25 sccm, respectively, for the absorption coefficient less than 10-3. The principle stresses were changed from tensor to compressor stress from 6,665 to - 916MPa for one layer to (HL)2 four layers. The shearing stresses were all tensor stresses from 5,876 to 406 MPa for one layer to (HL)2 four layers. The multi-layer films real reduced the residual stress.