Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems)

Semiconductor fabrication lines are organized using bays, equipment, and stockers. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots bet...

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Bibliographic Details
Published inSystems Modeling and Simulation: Theory and Applications pp. 514 - 520
Main Authors Han, Youngshin, Park, Dongsik, Chae, Sangwon, Lee, Chilgee
Format Book Chapter
LanguageEnglish
Published Berlin, Heidelberg Springer Berlin Heidelberg 2005
SeriesLecture Notes in Computer Science
Subjects
Automate Material Handling System
Average Cycle Time
Delivery Time
Dynamic Factory Modeling
Semiconductor Company
Online AccessGet full text
ISBN3540244778
9783540244776
ISSN0302-9743
1611-3349
DOI10.1007/978-3-540-30585-9_57

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Summary:Semiconductor fabrication lines are organized using bays, equipment, and stockers. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. The key concern for manufacturer is how to raise productivity and to reduce turn-around time. This paper presents a simulation to reduce turn around time and raise productivity by reducing the delivery time (which affects AMHS).
ISBN:3540244778
9783540244776
ISSN:0302-9743
1611-3349
DOI:10.1007/978-3-540-30585-9_57