Facet formation in strained Si1-xGex films

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Bibliographic Details
Published inSurface science Vol. 316; no. 3; pp. L1075 - L1080
Main Authors LUTZ, M. A, FEENSTRA, R. M, MOONEY, P. M, TERSOFF, J, CHU, J. O
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier Science 10.09.1994
Amsterdam
New York, NY
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Structure and morphology; thickness
Surface structure and topography
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Binary alloys
Atomic force microscopy
Relaxation
Germanium alloys
Silicon alloys
Biaxial strain
Experimental study
Facet
Surface structure
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ISSN0039-6028
DOI10.1016/0039-6028(94)91208-4

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ISSN:0039-6028
DOI:10.1016/0039-6028(94)91208-4