Ag 중간층이 SnO₂ 박막의 광학적, 전기적 특성에 미치는 영향

SnO2 single layer and SnO2/Ag/SnO2 (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO2 films show a visible transmit...

Full description

Saved in:
Bibliographic Details
Published inBiuletyn Uniejowski Vol. 54; no. 3; pp. 119 - 123
Main Authors 장진규(Jin-Kyu Jang), 김현진(Hyun-Jin Kim), 최재욱(Jae-Wook Choi), 이연학(Yeon-Hak Lee), 허성보(Sung-Bo Heo), 김유성(Yu-Sung Kim), 공영민(Young-Min Kong), 김대일(Daeil Kim)
Format Journal Article
LanguageKorean
Published 한국표면공학회 01.06.2021
Subjects
기계공학
AFM
XRD
SnO
Ag
Sheet resistance
Online AccessGet full text
ISSN1225-8024
2299-8403
2288-8403

Cover

More Information
Summary:SnO2 single layer and SnO2/Ag/SnO2 (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO2 films show a visible transmittance of 85.5 % and a sheet resistance of 1.2⨉104 Ω/□, the SAS films with a 15 nm thick Ag interlayer show a lower resistance of 18.8 Ω/□ and a visible transmittance of 70.6 %, respectively. The figure of merit based on the optical transmittance and sheet resistance revealed that the Ag interlayer in the SnO2 films enhances the opto-electrical performance without substrate heating or annealing process. KCI Citation Count: 2
ISSN:1225-8024
2299-8403
2288-8403