레이저 보조가공을 이용한 Si 광학부품의 초정밀 가공에 관한 연구

• Published in: 한국생산제조학회지 Vol. 30; no. 5; pp. 339 - 344
• Main Authors: 김대호(Dae Ho Kim), 홍준희(Jun Hee Hong)
• Format: Journal Article
• Language: Korean
• Published: 한국생산제조학회 01.10.2021
• Subjects: 기계공학; Surface roughness; Infrared optics; Diamond turning; Ultra-precision machining; Laser-assisted machining
• ISSN: 2508-5093; 2508-5107
• DOI: 10.7735/ksmte.2021.30.5.339

The performance of optical components is sensitive to the surface roughness; hence, ultra-precision machining technique is significantly important. In this paper, ultra-precision machining and laser-assisted machining was performed; We evaluated them as methods for machining of silicon, an infrared optical component material. Machining brittle material by a diamond turning machine is challenging; laser-assisted machining resolves this issue. For instance, Si is an optical material with superior optical characteristics; however, Si usage is limited due to poor machinability. In contrast, Si can be machined with good surface roughness using laser-assisted machining. We obtained a surface roughness under Ra 10 nm, form accuracy under Pt 250 nm at the found optimal machining condition. KCI Citation Count: 0