RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성
Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission S...
Saved in:
| Published in | Biuletyn Uniejowski Vol. 48; no. 6; pp. 292 - 296 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | Korean |
| Published |
한국표면공학회
2015
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1225-8024 2299-8403 2288-8403 |
| DOI | 10.5695/JKISE.2015.48.6.292 |
Cover
| Abstract | Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature. |
|---|---|
| AbstractList | Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from 100oC to 400oC. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at 200oC. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at 200oC all substrates temperature. KCI Citation Count: 0 Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature. |
| Author | 황동현(Dong Hyun Hwang) 김동렬(Dong Ryeol Kim) 배지환(Ji Hwan Bae) 손영국(Young Guk Son) |
| Author_xml | – sequence: 1 fullname: 김동렬(Dong Ryeol Kim) – sequence: 2 fullname: 배지환(Ji Hwan Bae) – sequence: 3 fullname: 황동현(Dong Hyun Hwang) – sequence: 4 fullname: 손영국(Young Guk Son) |
| BackLink | https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART002072010$$DAccess content in National Research Foundation of Korea (NRF) |
| BookMark | eNpFkE9LG0EchgdRaKp-gl7m0kMPu86f_c3uHEOa1KgYiDl56DC7mS1L0k3J1kOPgRw0IOIhoBAlgUAuHtKiaCGfKLv7HUybQk_Py8vDe3jfos24ExuE3lFig5Cwd3BYPSnbjFCwHc8WNpNsAxUYk9LyHMI3UYEyBpZHmPMG7SZJ5BMumCupcAvoc72C09n58vkl7U_zwUs6GeNsMM0vF3l_ns56OP01zEaLdDLC2XiU3V_nwxGuNk5rOJ0P09lFdneDl08P2WS-Kq7w8nEl3GbjHs4Hv7P-zx20Fep2Ynb_cRs1KuVGad86qn2qlopHVks60gqanDAS-lyQALQRAfW1S33Xk4K7HgU3oB5obZrMN5QbDT4BBwyVLglN4IV8G31Yz8bdULWCSHV09JdfOqrVVcV6o6ooAwHMWbnv124rSr5HKm4mbXVQPKz9OZA4DIC4Epj478Vn3eiraUZafVsF3f2hjmsfy0SAB5xK_go7p4sM |
| ContentType | Journal Article |
| DBID | DBRKI TDB JDI ACYCR |
| DEWEY | 671.7 |
| DOI | 10.5695/JKISE.2015.48.6.292 |
| DatabaseName | DBPIA - 디비피아 Nurimedia DBPIA Journals KoreaScience Korean Citation Index |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | History & Archaeology Engineering |
| DocumentTitleAlternate | Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering |
| DocumentTitle_FL | Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering |
| EISSN | 2299-8403 2288-8403 |
| EndPage | 296 |
| ExternalDocumentID | oai_kci_go_kr_ARTI_1256524 JAKO201504255079526 NODE06585319 |
| GroupedDBID | 0-V AAAGB ABUWG AFKRA ALMA_UNASSIGNED_HOLDINGS ALSLI ARALO AZQEC BENPR BPHCQ CCPQU DBRKI DWQXO GNUQQ GROUPED_DOAJ M2R OK1 PHGZT PQQKQ PROAC REL TDB Y2W .UV JDI ACYCR |
| ID | FETCH-LOGICAL-k949-cd3020fb360c5ae6c1ba71b7896378157c185aaed2be13ea5b0545e1970fec8f3 |
| ISSN | 1225-8024 |
| IngestDate | Sun Jun 01 03:16:59 EDT 2025 Fri Dec 22 12:03:53 EST 2023 Thu Mar 13 19:39:58 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Keywords | thin film ITZO transmittance RF Magnetron sputtering |
| Language | Korean |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-k949-cd3020fb360c5ae6c1ba71b7896378157c185aaed2be13ea5b0545e1970fec8f3 |
| Notes | KISTI1.1003/JNL.JAKO201504255079526 http://journal.kisehome.or.kr/ G704-000261.2015.48.6.009 |
| OpenAccessLink | http://click.ndsl.kr/servlet/LinkingDetailView?cn=JAKO201504255079526&dbt=JAKO&org_code=O481&site_code=SS1481&service_code=01 |
| PageCount | 5 |
| ParticipantIDs | nrf_kci_oai_kci_go_kr_ARTI_1256524 kisti_ndsl_JAKO201504255079526 nurimedia_primary_NODE06585319 |
| PublicationCentury | 2000 |
| PublicationDate | 2015 |
| PublicationDateYYYYMMDD | 2015-01-01 |
| PublicationDate_xml | – year: 2015 text: 2015 |
| PublicationDecade | 2010 |
| PublicationTitle | Biuletyn Uniejowski |
| PublicationTitleAlternate | Journal of the Korean institute of surface engineering |
| PublicationYear | 2015 |
| Publisher | 한국표면공학회 |
| Publisher_xml | – name: 한국표면공학회 |
| SSID | ssib036279167 ssib044738276 ssj0001528548 ssib053377541 ssib006781301 ssib051812033 ssib005300060 |
| Score | 1.9107977 |
| Snippet | Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from... Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from 100oC... |
| SourceID | nrf kisti nurimedia |
| SourceType | Open Website Open Access Repository Publisher |
| StartPage | 292 |
| SubjectTerms | 기계공학 |
| Title | RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성 |
| URI | https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE06585319 http://click.ndsl.kr/servlet/LinkingDetailView?cn=JAKO201504255079526&dbt=JAKO&org_code=O481&site_code=SS1481&service_code=01 https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART002072010 |
| Volume | 48 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| ispartofPNX | 한국표면공학회지, 2015, 48(6), , pp.292-296 |
| journalDatabaseRights | – providerCode: PRVEBS databaseName: Academic Search Ultimate customDbUrl: https://search.ebscohost.com/login.aspx?authtype=ip,shib&custid=s3936755&profile=ehost&defaultdb=asn eissn: 2299-8403 dateEnd: 99991231 omitProxy: true ssIdentifier: ssib051812033 issn: 1225-8024 databaseCode: ABDBF dateStart: 20131201 isFulltext: true titleUrlDefault: https://search.ebscohost.com/direct.asp?db=asn providerName: EBSCOhost – providerCode: PRVHPJ databaseName: ROAD: Directory of Open Access Scholarly Resources customDbUrl: eissn: 2299-8403 dateEnd: 99991231 omitProxy: true ssIdentifier: ssib044738276 issn: 1225-8024 databaseCode: M~E dateStart: 19670101 isFulltext: true titleUrlDefault: https://road.issn.org providerName: ISSN International Centre |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Na9RAFA9tPagH8RPrRwninMqu-ZgkM8dkN0s_sIW6QvFgyKeUlV2p7cWDUOhBCyIeCgqrtFDoxUMVxQr9i5rs_-B7k2w2loIfl93w5s0vb97bzHsvO_NGku4qOmRohk9rRhhBguL7QY1FYJDI56FmhZbmi1NL7i-YMw_p3LKxPDbeqaxaWl8L6uGLU_eV_I9VgQZ2xV2y_2DZEhQIcA32hU-wMHz-lY2XWtPEdYhtEcaIaxPHIg5DCqPEpsRtEmYXFFsltgLcDSQVbU3iNMQFJY4yBFIFpKMRbiA3bwgmAcAbAsBWkIptLuEqAgArtM22Hy3mnRXROcfjghN42LQQ0SC26Ax4jjJkZ628kVYAeXEvIVE-EkFCadVqTF1KMMRvCooqKCAER1xs0rF1hA4XNmG5MCBo-b-N4OW4BAQ12RK8DkoyKlNZiI1aKzoLOE44G7EIgs0rKKgFwuiIBUZjEi5QsEUtR1B9GZNvRC08B0yM4O7zDeFD10JZ5RH6zU_kBwAWIYeWH-p70psZJsfCH3Pzsw9cXIRo1Cmrm_Wyb7V2-AmfXq60nLPnF7Erzs0Q-nNDM8elM5oFYRmuc33pViZjUZxnNBlbDOKbcvKHQMfi6ihWpdTSmTaKZSFtwGKK4gXHUBV5lS8cxr1TBgHpIOZIKxDVdVchGDzbXccTLWBarER47YvShSI1k-38ObskjXV6l6XzlYKdV6THSy053X91_OMw3dwbbB2muztytrU3eHM02DxI9zfk9Ot21j9Kd_tyttPPPr0bbPdlfC7k9GA73X-dfXwvH3__nO0eAOGtfPwNGD5kOxvyYOtntvnlqtRuue3GTK04oaTW4ZTXwkiHbCsJdFMJDT82QzXwLTWwGHg10J5hhRAN-34caUGs6rFvgJqoEavcUpI4ZIl-TZro9rrxdUkOItOKEjPUQz-ksWWAoaBL4ie6mkSmH09KU0JZXjd6_tQ7xaqT0h3QotcJVzysGI_fT3peZ9WDvHjWgzTGNDQKKKWSvWd5ORtvYbHpYiKC3vjGn25zUzqHlPwl5C1pYm11Pb4NYflaMCV-Tr8Aygi3AA |
| linkProvider | ISSN International Centre |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=RF+%EB%A7%88%EA%B7%B8%EB%84%A4%ED%8A%B8%EB%A1%A0+%EC%8A%A4%ED%8D%BC%ED%84%B0%EB%A7%81+%EB%B2%95%EC%9C%BC%EB%A1%9C+%EC%A0%9C%EC%9E%91%ED%95%9C+ITZO+%EB%B0%95%EB%A7%89%EC%9D%98+%EA%B5%AC%EC%A1%B0+%EB%B0%8F+%EA%B4%91%ED%95%99%EC%A0%81+%ED%8A%B9%EC%84%B1&rft.jtitle=%ED%95%9C%EA%B5%AD%ED%91%9C%EB%A9%B4%EA%B3%B5%ED%95%99%ED%9A%8C%EC%A7%80&rft.au=%EA%B9%80%EB%8F%99%EB%A0%AC&rft.au=%EB%B0%B0%EC%A7%80%ED%99%98&rft.au=%ED%99%A9%EB%8F%99%ED%98%84&rft.au=%EC%86%90%EC%98%81%EA%B5%AD&rft.date=2015&rft.issn=1225-8024&rft.volume=48&rft.issue=6&rft.spage=292&rft.epage=296&rft_id=info:doi/10.5695%2FJKISE.2015.48.6.292&rft.externalDBID=n%2Fa&rft.externalDocID=JAKO201504255079526 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1225-8024&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1225-8024&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1225-8024&client=summon |