Ti-Al-N과 Ti-Al-Si-N 코팅막의 상 특성 및 내산화 거동

Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocompo...

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Published in한국표면공학회지 Vol. 37; no. 3; pp. 152 - 157
Main Authors 김정욱, 전준하, 조건, 김광호, Kim, Jung-Wook, Jeon, Jun-Ha, Cho, Gun, Kim, Kwang-Ho
Format Journal Article
LanguageKorean
Published 한국표면공학회 2004
Subjects
기계공학
Ti-Al-Si-N
Oxidation
Nanocomposite
Coatings
Ti-Al-N
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ISSN1225-8024
2288-8403

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Summary:Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocomposite microstructure consisting of nanosized(Ti,Al,Si)N crystallites and amorphous $Si_3$$N_4$, with smooth surface morphology. Ti-Al-N coating of which surface $Al_2$$O_3$ layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about $700^{\circ}C$. Ti-Al-Si-N coating showed better oxidation resistance because both surface Ab03 and near-surface $SiO_2$ layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.
Bibliography:KISTI1.1003/JNL.JAKO200411922377051
G704-000261.2004.37.3.007
ISSN:1225-8024
2288-8403