3가 크롬 박막 내의 극미세 결함 측정을 위한 중성자 소각 산란법의 적용

• Published in: 한국표면공학회지 Vol. 37; no. 3; pp. 175 - 178
• Main Authors: 최용, Choi, Yong
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2004
• Subjects: 기계공학; Small angle neutron scattering; Chromium-carbon; Trivalent chromium bath
• ISSN: 1225-8024; 2288-8403

The size and number of nano-size defects of thin trivalent chrome layers were determined by small angle neutron scattering (SANS) without breaking the thin chrome layers. Most of defect size of the trivalent chromium prepared in this test conditions is in the range of about 40nm. The number of nano-size defects less than about 40nm of the trivalent chromium layer increases with plating voltage at constant current density From this study, SANS is proved as one of useful techniques to evaluate nano-size defects of thin film layer.