4H-SiCエピ層中の転位

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Bibliographic Details
Published inJournal of the Vacuum Society of Japan Vol. 60; no. 8; pp. 285 - 291
Main Author 坂, 公恭
Format Journal Article
LanguageJapanese
Published 一般社団法人 日本真空学会 2017
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ISSN1882-2398
1882-4749
DOI10.3131/jvsj2.60.285

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ISSN:1882-2398
1882-4749
DOI:10.3131/jvsj2.60.285