ZnO多結晶薄膜に対するアルゴンイオンスパッタの影響

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Published inJournal of Surface Analysis Vol. 30; no. 3; p. 207
Main Authors 川村, 鮎人, 牧野, 久雄
Format Journal Article
LanguageJapanese
Published 一般社団法人　表面分析研究会 2024
Online AccessGet full text
ISSN1341-1756
1347-8400
DOI10.1384/jsa.30.207

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Author 牧野, 久雄
川村, 鮎人
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References [3]川村鮎人，牧野久雄，応用物理・物理系学会中国四国支部合同学術講演会公演予稿集，PP101 (2023) .‚ガラス基板上ZnO多結晶膜の極性制御とピエゾ効果に関する研究
[1]M. Yoshitake, J. Vac. Sci. Tech. A 39, 063217 (2021).‚General method for predicting ZnO-metal interface termination: Extension of the method for Al2O3-metal systems.
[2]J. Williams, H. Yoshikawa, S. Ueda, et al., Appl. Phys. Lett. 100, 051902 (2012).‚Polarity-dependent photoemission spectra of wurtzite-type zinc oxide.
References_xml – reference: [2]J. Williams, H. Yoshikawa, S. Ueda, et al., Appl. Phys. Lett. 100, 051902 (2012).‚Polarity-dependent photoemission spectra of wurtzite-type zinc oxide.”
– reference: [1]M. Yoshitake, J. Vac. Sci. Tech. A 39, 063217 (2021).‚General method for predicting ZnO-metal interface termination: Extension of the method for Al2O3-metal systems.”
– reference: [3]川村鮎人，牧野久雄，応用物理・物理系学会中国四国支部合同学術講演会公演予稿集，PP101 (2023) .‚ガラス基板上ZnO多結晶膜の極性制御とピエゾ効果に関する研究”
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StartPage 207
Title ZnO多結晶薄膜に対するアルゴンイオンスパッタの影響
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