反応性蒸着
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| Published in | 応用物理 Vol. 62; no. 12; pp. 1250 - 1251 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | Japanese |
| Published |
公益社団法人 応用物理学会
1993
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| Online Access | Get full text |
| ISSN | 0369-8009 2188-2290 |
| DOI | 10.11470/oubutsu1932.62.1250 |
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| Author | 矢野, 義彦 飯島, 賢二 坂東, 尚周 寺嶋, 孝仁 |
|---|---|
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| DOI | 10.11470/oubutsu1932.62.1250 |
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| EndPage | 1251 |
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| References | 2) Y. Yano, K. Iijima, T. Terashima, Y. Daitoh, Y. Bando, Y. Watanabe, H. Kasatani and H. Terauchi: J. Appl. Phys.,投稿予定. 1) K. Iijima, T. Terashima, Y. Bando, K. Kamigaki and H. Terauchi: J. Appl. Phys., 72, 2840 (1992). |
| References_xml | – reference: 1) K. Iijima, T. Terashima, Y. Bando, K. Kamigaki and H. Terauchi: J. Appl. Phys., 72, 2840 (1992). – reference: 2) Y. Yano, K. Iijima, T. Terashima, Y. Daitoh, Y. Bando, Y. Watanabe, H. Kasatani and H. Terauchi: J. Appl. Phys.,投稿予定. |
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| Title | 反応性蒸着 |
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