反応性蒸着

Saved in:
Bibliographic Details
Published in応用物理 Vol. 62; no. 12; pp. 1250 - 1251
Main Authors 寺嶋, 孝仁, 飯島, 賢二, 矢野, 義彦, 坂東, 尚周
Format Journal Article
LanguageJapanese
Published 公益社団法人 応用物理学会 1993
Online AccessGet full text
ISSN0369-8009
2188-2290
DOI10.11470/oubutsu1932.62.1250

Cover

More Information
ISSN:0369-8009
2188-2290
DOI:10.11470/oubutsu1932.62.1250