異材界面の剥離予測手法を用いた半導体パッケージにおける金属/樹脂界面の評価

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Published inスマートプロセス学会誌 Vol. 13; no. 5; pp. 240 - 245
Main Authors 池田, 徹, 田靡, 京, 松尾, 圭一郎, 久保, 悠, 山本, 哲也
Format Journal Article
LanguageJapanese
Published 一般社団法人 スマートプロセス学会 (旧高温学会) 10.09.2024
Online AccessGet full text
ISSN2186-702X
2187-1337
DOI10.7791/jspmee.13.240

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Author 久保, 悠
山本, 哲也
田靡, 京
池田, 徹
松尾, 圭一郎
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  fullname: 田靡, 京
  organization: 東芝デバイス&ストレージ株式会社
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  fullname: 松尾, 圭一郎
  organization: 株式会社東芝 生産技術センター
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  fullname: 久保, 悠
  organization: 株式会社東芝 生産技術センター
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  fullname: 山本, 哲也
  organization: 株式会社東芝 生産技術センター
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References 5) T. Ikeda, Y. Ueno, N. Miyazaki and N. Ito: “Design for Plastic Packages of LSI Chips to Prevent Cracking during Solder Reflow Process”, Journal of Japan Institute of Electronics Packaging, 4-1 (2001), 47-55. (in Japanese
7) T. Ikeda, Y. Komohara and N. Miyazaki: “Stress Intensity Factor Analysis of an Interface Crack between Dissimilar Materials under Thermal Stress Condition by Virtual Crack Extension Method”, Transactions of the Japan Society of Mechanical Engineers, A63-611 (1997), 1377-1384. (in Japanese
6) M. Kitano, A. Nishimura and S. Kawai: “A Study of Package Cracking during the Reflow Soldering Process (2nd Report, Strength Evaluation of the Plastic by Using Stress Singularity Theory)”, Transactions of the Japan Society of Mechanical Engineers, A57-538 (1991), 1398-1405. (in Japanese
1) G. Okura: “New-Generation Low-Voltage MOSFETs Contributing to High-Performance and Compact ECUs for Automotive Use”, Toshiba review, 69-8 (2014), 16-19. (in Japanese
8) S. Kawashita, Y. Nanazoshi, T. Ikeda, M. Koganemaru, H. Hokazono and T. Asai: “Evaluation of the Delimitation of Molding Resin in a Power Module under Thermal Cycle Test”, Journal of Smart Processing, 7-4 (2018), 146-153. (in Japanese
9) JIS Standard K7086-1993, “Testing methods for interlaminar fracture toughness of carbon fiber reinforced plastics”, (1993
2) H. Tabata: “The Influence of Adhesive Property of Epoxy Molding Compound to Reliability of Semiconductor Devices”, Journal of the Surface Finishing Society of Japan, 44-12 (1993), 1044-1048. (in Japanese
3) SEMI G69-0996 (Reapproved 0318), “Test Method for Measurement of Adhesive Strength between Leadframes and Molding Compounds”, (2004).
4) M. Yamazaki and T. Iwasaki: “Evaluating of Adhesive Strength on Resin-Metal Interface”, Journal of the Surface Finishing Society of Japan, 63-12 (2012), 739-745. (in Japanese
References_xml – reference: 8) S. Kawashita, Y. Nanazoshi, T. Ikeda, M. Koganemaru, H. Hokazono and T. Asai: “Evaluation of the Delimitation of Molding Resin in a Power Module under Thermal Cycle Test”, Journal of Smart Processing, 7-4 (2018), 146-153. (in Japanese)
– reference: 5) T. Ikeda, Y. Ueno, N. Miyazaki and N. Ito: “Design for Plastic Packages of LSI Chips to Prevent Cracking during Solder Reflow Process”, Journal of Japan Institute of Electronics Packaging, 4-1 (2001), 47-55. (in Japanese)
– reference: 6) M. Kitano, A. Nishimura and S. Kawai: “A Study of Package Cracking during the Reflow Soldering Process (2nd Report, Strength Evaluation of the Plastic by Using Stress Singularity Theory)”, Transactions of the Japan Society of Mechanical Engineers, A57-538 (1991), 1398-1405. (in Japanese)
– reference: 3) SEMI G69-0996 (Reapproved 0318), “Test Method for Measurement of Adhesive Strength between Leadframes and Molding Compounds”, (2004).
– reference: 2) H. Tabata: “The Influence of Adhesive Property of Epoxy Molding Compound to Reliability of Semiconductor Devices”, Journal of the Surface Finishing Society of Japan, 44-12 (1993), 1044-1048. (in Japanese)
– reference: 4) M. Yamazaki and T. Iwasaki: “Evaluating of Adhesive Strength on Resin-Metal Interface”, Journal of the Surface Finishing Society of Japan, 63-12 (2012), 739-745. (in Japanese)
– reference: 7) T. Ikeda, Y. Komohara and N. Miyazaki: “Stress Intensity Factor Analysis of an Interface Crack between Dissimilar Materials under Thermal Stress Condition by Virtual Crack Extension Method”, Transactions of the Japan Society of Mechanical Engineers, A63-611 (1997), 1377-1384. (in Japanese)
– reference: 1) G. Okura: “New-Generation Low-Voltage MOSFETs Contributing to High-Performance and Compact ECUs for Automotive Use”, Toshiba review, 69-8 (2014), 16-19. (in Japanese)
– reference: 9) JIS Standard K7086-1993, “Testing methods for interlaminar fracture toughness of carbon fiber reinforced plastics”, (1993)
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Title 異材界面の剥離予測手法を用いた半導体パッケージにおける金属/樹脂界面の評価
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