Melt Flow during Silicon Crystal Growth

The quality of large semiconductor crystals grown from silicon melts is significantly affected by the heat and mass transfer in the melt. The characteristics of silicon flows are reviewed by focusing on the Coriolis force in the rotating melt. Description of flow instability is included that shows o...

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Bibliographic Details
Published inJournal of Japan Society of Fluid Mechanics Vol. 13; no. 1; pp. 5 - 15
Main Authors WATANABE, Masahito, HIBIYA, Taketoshi, KAKIMOTO, Koichi, EGUCHI, Minoru
Format Journal Article
LanguageJapanese
Published The Japan Society of Fluid Mechanics 1994
社団法人 日本流体力学会
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ISSN0286-3154
2185-4912
DOI10.11426/nagare1982.13.5

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Summary:The quality of large semiconductor crystals grown from silicon melts is significantly affected by the heat and mass transfer in the melt. The characteristics of silicon flows are reviewed by focusing on the Coriolis force in the rotating melt. Description of flow instability is included that shows our level of understanding of melt convection with a low Prandtl number.
ISSN:0286-3154
2185-4912
DOI:10.11426/nagare1982.13.5