Development of a Giant Magnetostriction-Type Ultraprecision Positioning Device and Ultraprecision Machine Tool Equipped with It

A giant magnetostriction-type ultraprecision positioning device (GMUPD) was manufactured from newly developed giant magnetostriction materials with compositions of Tb1-xDyx(FeyMn1-y)n. The output power of them is several times and the displacement is several ten times that of PZT without a magnifier...

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Published inTransactions of the Japan Society of Mechanical Engineers Series C Vol. 60; no. 572; pp. 1446 - 1452
Main Authors Hamada, Ryuji, Eda, Hiroshi, Sasaki, Yasuhiko
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 25.04.1994
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ISSN0387-5024
1884-8354
DOI10.1299/kikaic.60.1446

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Abstract A giant magnetostriction-type ultraprecision positioning device (GMUPD) was manufactured from newly developed giant magnetostriction materials with compositions of Tb1-xDyx(FeyMn1-y)n. The output power of them is several times and the displacement is several ten times that of PZT without a magnifier. An ultraprecision machine tool was developed with the present GMUPD. The workpiece can be fed at a rate of 0.1 mm/min or 600 mm/min and is cut by a turning diamond tool. The hard and brittle materials such as glass and ceramics were finished in the ductile mode, and surface roughness was obtained within several nanometers.
AbstractList A giant magnetostriction-type ultraprecision positioning device (GMUPD) was manufactured from newly developed giant magnetostriction materials with compositions of Tb1-xDyx(FeyMn1-y)n. The output power of them is several times and the displacement is several ten times that of PZT without a magnifier. An ultraprecision machine tool was developed with the present GMUPD. The workpiece can be fed at a rate of 0.1 mm/min or 600 mm/min and is cut by a turning diamond tool. The hard and brittle materials such as glass and ceramics were finished in the ductile mode, and surface roughness was obtained within several nanometers.
Author Eda, Hiroshi
Sasaki, Yasuhiko
Hamada, Ryuji
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References (1) Clark, A. E., Mgnetostricitive Rare Earth-Fe2 Compounds, a Ferromagnetic Materials, 1 (1980), 531.
(4) 江田•小野間•佐橋•小林, 精密工学会誌, 57-3 (1991), 532.
(6) Blake, P. M. and Scattergood, R. O., J. Am. Ceram., 73-4 (1990), 949.
(7) 佐川•江田, 機論, 57-538, C (1991), 2160.
(3) 江田•佐橋•小林, 精密工学会誌, 56-2 (1990), 388.
(5) 江田, 超精密工作機械の製作, (1993), 75, 工業調査会.
(8) 江田, 特許1774200号, 回転工具, (1992).
(2) 江田, 精密工学会誌, 57-3 (1991), 445.
References_xml – reference: (3) 江田•佐橋•小林, 精密工学会誌, 56-2 (1990), 388.
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– reference: (5) 江田, 超精密工作機械の製作, (1993), 75, 工業調査会.
– reference: (1) Clark, A. E., Mgnetostricitive Rare Earth-Fe2 Compounds, a Ferromagnetic Materials, 1 (1980), 531.
– reference: (6) Blake, P. M. and Scattergood, R. O., J. Am. Ceram., 73-4 (1990), 949.
– reference: (2) 江田, 精密工学会誌, 57-3 (1991), 445.
– reference: (7) 佐川•江田, 機論, 57-538, C (1991), 2160.
– reference: (8) 江田, 特許1774200号, 回転工具, (1992).
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Snippet A giant magnetostriction-type ultraprecision positioning device (GMUPD) was manufactured from newly developed giant magnetostriction materials with...
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StartPage 1446
SubjectTerms Diamond Turning
Ductile Mode Type
Giant Magnetostriction Materials
Ultrapositioning Device
Ultraprecsion Machine Tool
Title Development of a Giant Magnetostriction-Type Ultraprecision Positioning Device and Ultraprecision Machine Tool Equipped with It
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