Development of a Giant Magnetostriction-Type Ultraprecision Positioning Device and Ultraprecision Machine Tool Equipped with It

• Published in: Transactions of the Japan Society of Mechanical Engineers Series C Vol. 60; no. 572; pp. 1446 - 1452
• Main Authors: Hamada, Ryuji, Eda, Hiroshi, Sasaki, Yasuhiko
• Format: Journal Article
• Language: Japanese
• Published: The Japan Society of Mechanical Engineers 25.04.1994
• Subjects: Diamond Turning; Ductile Mode Type; Giant Magnetostriction Materials; Ultrapositioning Device; Ultraprecsion Machine Tool
• ISSN: 0387-5024; 1884-8354
• DOI: 10.1299/kikaic.60.1446

A giant magnetostriction-type ultraprecision positioning device (GMUPD) was manufactured from newly developed giant magnetostriction materials with compositions of Tb1-xDyx(FeyMn1-y)n. The output power of them is several times and the displacement is several ten times that of PZT without a magnifier. An ultraprecision machine tool was developed with the present GMUPD. The workpiece can be fed at a rate of 0.1 mm/min or 600 mm/min and is cut by a turning diamond tool. The hard and brittle materials such as glass and ceramics were finished in the ductile mode, and surface roughness was obtained within several nanometers.