Flexible capacitive sensors for high resolution pressure measurement

Thin, flexible, robust capacitive pressure sensors have been the subject of research in many fields where axial strain sensing with high spatial resolution and pressure resolution is desirable for small loads, such as tactile robotics and biomechanics. Simple capacitive pressure sensors have been de...

Full description

Saved in:
Bibliographic Details
Published in2008 IEEE Sensors pp. 1484 - 1487
Main Authors Pritchard, E., Mahfouz, M., Evans, B., Eliza, S., Haider, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2008
Subjects
Analytical models
Biomechanics
Biosensors
Capacitive sensors
Pressure measurement
Robot sensing systems
Robustness
Sensor arrays
Spatial resolution
Tactile sensors
Online AccessGet full text
ISBN1424425808
9781424425808
ISSN1930-0395
DOI10.1109/ICSENS.2008.4716726

Cover

More Information
Summary:Thin, flexible, robust capacitive pressure sensors have been the subject of research in many fields where axial strain sensing with high spatial resolution and pressure resolution is desirable for small loads, such as tactile robotics and biomechanics. Simple capacitive pressure sensors have been designed and implemented on flexible substrates in general agreement with performance predicted by an analytical model. Two designs are demonstrated for comparison. The first design uses standard flex circuit technology, and the second design uses photolithography techniques to fabricate capacitive sensors with higher spatial and higher pressure resolution. Sensor arrays of varying sensor size and spacing are tested with applied loads from 0 to 1 MPa. Pressure resolution and linearity of the sensors are significantly improved with the miniaturized, custom fabricated sensor array compared to standard flexible circuit technology.
ISBN:1424425808
9781424425808
ISSN:1930-0395
DOI:10.1109/ICSENS.2008.4716726