Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes

• Published in: 2007 IEEE International Conference on Control Applications pp. 118 - 123
• Main Authors: Qing Zheng, Lili Dong, Zhiqiang Gao
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.10.2007
• Subjects: Active noise reduction; Demodulation; Error correction; Force control; Frequency; Gyroscopes; Micromechanical devices; Observers; State estimation; Vibration control
• ISBN: 9781424404421; 1424404428
• ISSN: 1085-1992
• DOI: 10.1109/CCA.2007.4389216

There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate.